Uploaded on Mar 26, 2025
A new high-precision positioner with a large positioning range is designed for an in-situ indenter inside an SEM chamber. The compact design fits the confined space, allowing precise indentation depth control via a piezoelectric actuator. This eliminates the need for sequential indentations by enabling deep penetration in a single step, reducing position errors and unwanted lateral forces. The proposed system enhances nanoindentation accuracy and will be implemented in Continuous Stiffness Measurement (CSM) techniques to evaluate elastic properties with high-frequency loading and unloading cycles.
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